@article{oai:hi-tech.repo.nii.ac.jp:00002414, author = {MASUDA, Yoichiro and 増田, 陽一郎 and NOZAKA, Takashi and 野坂, 隆 and 増本, 博 and MASUMOTO, Hiroshi and 後藤, 孝 and GOTO, Takashi}, month = {Feb}, note = {110004323742}, pages = {19--24}, title = {Leakage Current Properties of PZT Thin Film Capacitors}, year = {2004}, yomi = {マスダ, ヨウイチロウ and ノザカ, タカシ and マスモト, ヒロシ and ゴトウ, タカシ} }